Strain mapping and simulation of transistor structures in a 22nm FDSOI technology
Dirk Utess; Dominik Martin Kleimaier; Etienne Billan; Tashfain Youssuf; Zhixing Zhao; Thorgund Nemec; Moritz Andreas Meyer; Jochen Rinderknecht
- Published
- Publisher
- EDP Sciences
- Journal / collection
- BIO Web of Conferences
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1051/bioconf/202412924030
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Cite this source
Dirk Utess; Dominik Martin Kleimaier; Etienne Billan; Tashfain Youssuf; Zhixing Zhao; Thorgund Nemec; Moritz Andreas Meyer; Jochen Rinderknecht. Strain mapping and simulation of transistor structures in a 22nm FDSOI technology. BIO Web of Conferences. 2024. https://doi.org/10.1051/bioconf/202412924030