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Research literature / Conference paper

High Spatial Resolution Imaging of Dopants and Impurities for Semiconductor Device Using NanoSIMS

Place Junichiro Sameshima; Yoshihiko Nakata; Seishi Akahori; Hideki Hashimoto; Masanobu Yoshikawa

Published
Publisher
IEEE
Journal / collection
2024 IEEE 26th Electronics Packaging Technology Conference (EPTC)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/eptc62800.2024.10909954

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Place Junichiro Sameshima; Yoshihiko Nakata; Seishi Akahori; Hideki Hashimoto; Masanobu Yoshikawa. High Spatial Resolution Imaging of Dopants and Impurities for Semiconductor Device Using NanoSIMS. 2024 IEEE 26th Electronics Packaging Technology Conference (EPTC). 2024-12-03. https://doi.org/10.1109/eptc62800.2024.10909954

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