Effect of Passivation on BEOL-Compatible Oxide Semiconductor Transistor
Chi-Yuan Kuo; Tsung-Tien Lo; Yun-Ping Chiu; Wei-Chen Lin; Hsien-Yi Liao; Chi-Hang Tsai; Sheng-Chia Lu; Hsin-Chu Chen; Haw-Tyng Huang; Po-Chun Yeh; Yuh-Renn Wu; Chih-I Wu
- Published
- Publisher
- IEEE
- Journal / collection
- 2024 International VLSI Symposium on Technology, Systems and Applications (VLSI TSA)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/vlsitsa60681.2024.10546465
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Cite this source
Chi-Yuan Kuo; Tsung-Tien Lo; Yun-Ping Chiu; Wei-Chen Lin; Hsien-Yi Liao; Chi-Hang Tsai; Sheng-Chia Lu; Hsin-Chu Chen; Haw-Tyng Huang; Po-Chun Yeh; Yuh-Renn Wu; Chih-I Wu. Effect of Passivation on BEOL-Compatible Oxide Semiconductor Transistor. 2024 International VLSI Symposium on Technology, Systems and Applications (VLSI TSA). 2024-04-22. https://doi.org/10.1109/vlsitsa60681.2024.10546465