Skip to content
OPEN VARIABLE

Evidence-First Signal Intelligence

Menu

Research literature / Conference paper

Manufacturing of 2D/3D features on NIL masters

Haiko Rolff; Martin Sczyrba; Marcel Kristlib

Published
Publisher
SPIE
Journal / collection
39th European Mask and Lithography Conference (EMLC 2024)
Research area
Industrial systems
Source type
Conference paper
DOI
10.1117/12.3029920

Read the original source ↗

The original publisher provides the full text and its access options.

Cite this source

Haiko Rolff; Martin Sczyrba; Marcel Kristlib. Manufacturing of 2D/3D features on NIL masters. 39th European Mask and Lithography Conference (EMLC 2024). 2024-09-18. https://doi.org/10.1117/12.3029920

Download RIS