Sub-5 nm ultrathin IGO film transistor printed by micro-doped InGa liquid alloy
Jiaming Guo; Jing Li; Shanhao Ze; Fei Li; Junchao Wang; Qing Liu; Zhe Hua; Liu Yang; Fei Liu; Baodan Liu
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Applied Surface Science
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.apsusc.2024.160131
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Cite this source
Jiaming Guo; Jing Li; Shanhao Ze; Fei Li; Junchao Wang; Qing Liu; Zhe Hua; Liu Yang; Fei Liu; Baodan Liu. Sub-5 nm ultrathin IGO film transistor printed by micro-doped InGa liquid alloy. Applied Surface Science. 2024-08. https://doi.org/10.1016/j.apsusc.2024.160131