Charge-free plasma processing using ultra-low electron temperature plasma for atomic-scale semiconductor devices
Min-Seok Kim; Na Yeon Kim; Junyoung Park; Chin-Wook Chung
- Published
- Publisher
- IOP Publishing
- Journal / collection
- Plasma Sources Science and Technology
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1088/1361-6595/adc332
The original publisher provides the full text and its access options.
Cite this source
Min-Seok Kim; Na Yeon Kim; Junyoung Park; Chin-Wook Chung. Charge-free plasma processing using ultra-low electron temperature plasma for atomic-scale semiconductor devices. Plasma Sources Science and Technology. 2025-04-01. https://doi.org/10.1088/1361-6595/adc332