Enhanced Passive Voltage Contrast Imaging Using a Compound Lens Enabled by In-Lens Detector Optimization for Advanced Semiconductor Devices
Noriyuki Inoue; Shinobu Uno; Yasuyuki Okano; Shunsuke Asahina
- Published
- Publisher
- ASM International
- Journal / collection
- International Symposium for Testing and Failure Analysis
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.31399/asm.cp.istfa2026p0379
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Cite this source
Noriyuki Inoue; Shinobu Uno; Yasuyuki Okano; Shunsuke Asahina. Enhanced Passive Voltage Contrast Imaging Using a Compound Lens Enabled by In-Lens Detector Optimization for Advanced Semiconductor Devices. International Symposium for Testing and Failure Analysis. 2026-10-04. https://doi.org/10.31399/asm.cp.istfa2026p0379