Sustainable semiconductor manufacturing with a focus on lithography
Emily E. Gallagher
- Published
- Publisher
- SPIE
- Journal / collection
- Novel Patterning Technologies 2024
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3013557
The original publisher provides the full text and its access options.
Cite this source
Emily E. Gallagher. Sustainable semiconductor manufacturing with a focus on lithography. Novel Patterning Technologies 2024. 2024-04-10. https://doi.org/10.1117/12.3013557