ENHANCING THE PERFORMANCE OF SEMICONDUCTOR EQUIPMENT BY PREVENTING BYPRODUCT BUILDUP IN ETCH PROCESS CHAMBER
Deepak Doddabelavangala Srikantaiah
- Published
- Publisher
- IAEME Publication
- Journal / collection
- INTERNATIONAL JOURNAL OF COMPUTER ENGINEERING AND TECHNOLOGY
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.34218/ijcet_15_06_180
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Cite this source
Deepak Doddabelavangala Srikantaiah. ENHANCING THE PERFORMANCE OF SEMICONDUCTOR EQUIPMENT BY PREVENTING BYPRODUCT BUILDUP IN ETCH PROCESS CHAMBER. INTERNATIONAL JOURNAL OF COMPUTER ENGINEERING AND TECHNOLOGY. 2024-12-31. https://doi.org/10.34218/ijcet_15_06_180