High-Precision Semiconductor Substrate Thickness Gauge Based on Spectral-Domain Interferometry
Shuncong Zhong; Renyu He; Yaosen Deng; Jiewen Lin; Qiukun Zhang
- Published
- Publisher
- MDPI AG
- Journal / collection
- Photonics
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.3390/photonics11050422
The original publisher provides the full text and its access options.
Cite this source
Shuncong Zhong; Renyu He; Yaosen Deng; Jiewen Lin; Qiukun Zhang. High-Precision Semiconductor Substrate Thickness Gauge Based on Spectral-Domain Interferometry. Photonics. 2024-05-01. https://doi.org/10.3390/photonics11050422