Clean Semiconductor-Graphene Material Stacks for Remote Epitaxial Growth
Manny de Jesus Lopez; Sadhvikas Addamane; Justine Koepke; Scott Schmucker; Kevin Jones
- Published
- Publisher
- US DOE
- Journal / collection
- New Mexico AVS Technical Symposium - Albuquerque, New Mexico, United States of America - May - 2024
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.2172/2565162
The original publisher provides the full text and its access options.
Cite this source
Manny de Jesus Lopez; Sadhvikas Addamane; Justine Koepke; Scott Schmucker; Kevin Jones. Clean Semiconductor-Graphene Material Stacks for Remote Epitaxial Growth. New Mexico AVS Technical Symposium - Albuquerque, New Mexico, United States of America - May - 2024. 2024-05-01. https://doi.org/10.2172/2565162