Enhancing Predictive Analytics in Semiconductor Manufacturing: A Deep Learning Approach for Overall Equipment Efficiency Estimation
Filippo Boni; Riccardo De Monte; Yao Yang; Natalie Gentner; Joon Khim Low; Gian Antonio Susto
- Published
- Publisher
- IEEE
- Journal / collection
- 2024 10th International Conference on Control, Decision and Information Technologies (CoDIT)
- Research area
- AI & compute
- Source type
- Conference paper
- DOI
- 10.1109/codit62066.2024.10708503
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Cite this source
Filippo Boni; Riccardo De Monte; Yao Yang; Natalie Gentner; Joon Khim Low; Gian Antonio Susto. Enhancing Predictive Analytics in Semiconductor Manufacturing: A Deep Learning Approach for Overall Equipment Efficiency Estimation. 2024 10th International Conference on Control, Decision and Information Technologies (CoDIT). 2024-07-01. https://doi.org/10.1109/codit62066.2024.10708503