Terahertz testing of semiconductor devices and integrated circuits
Michael S. Shur
- Published
- Publisher
- SPIE
- Journal / collection
- Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XVIII
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3048617
The original publisher provides the full text and its access options.
Cite this source
Michael S. Shur. Terahertz testing of semiconductor devices and integrated circuits. Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XVIII. 2025-03-19. https://doi.org/10.1117/12.3048617