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Research literature / Conference paper

Cloud Big Data Lake for Advanced Analytics in Semiconductor Manufacturing

Susan Sun; Jeff Ye; Hubert Schwarthoff; Jon Rosin; Varalakshmi Vakkalagadda; Jimmy Chang; Sesidhar Reddy Ubbara; Anil Chinthakindi

Published
Publisher
IEEE
Journal / collection
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/asmc61125.2024.10545365

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Susan Sun; Jeff Ye; Hubert Schwarthoff; Jon Rosin; Varalakshmi Vakkalagadda; Jimmy Chang; Sesidhar Reddy Ubbara; Anil Chinthakindi. Cloud Big Data Lake for Advanced Analytics in Semiconductor Manufacturing. 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC). 2024-05-13. https://doi.org/10.1109/asmc61125.2024.10545365

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