Research on Magnetorheological Ultra Precision Processing Technology and Key Technologies for Semiconductor Wafers
Junye Li; Jiaxu Tang; Jun Zhang; Xiao Li; Bin Li; Qingxin Meng; Ping Jiang; Jinbao Zhu
- Published
- Publisher
- Research Square Platform LLC
- Research area
- Semiconductors
- Source type
- Preprint / posted paper
- DOI
- 10.21203/rs.3.rs-4119621/v1
This is a preprint or other posted paper. Check the original source for its review and publication status.
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Cite this source
Junye Li; Jiaxu Tang; Jun Zhang; Xiao Li; Bin Li; Qingxin Meng; Ping Jiang; Jinbao Zhu. Research on Magnetorheological Ultra Precision Processing Technology and Key Technologies for Semiconductor Wafers. Research Square Platform LLC. 2024-04-11. https://doi.org/10.21203/rs.3.rs-4119621/v1