In–situ strain control in epitaxial silicon carbide compound semiconductor
Maksym Myronov; Behzad Jazizadeh
- Published
- Publisher
- Springer Science and Business Media LLC
- Research area
- Semiconductors
- Source type
- Preprint / posted paper
- DOI
- 10.21203/rs.3.rs-4600047/v1
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Cite this source
Maksym Myronov; Behzad Jazizadeh. In–situ strain control in epitaxial silicon carbide compound semiconductor. Springer Science and Business Media LLC. 2024-07-12. https://doi.org/10.21203/rs.3.rs-4600047/v1