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Research literature / Journal article

Magnetic Levitation Guiding System of a Ropeless Elevator for Semiconductor Wafer Vertical Transport: Experimental Evaluation

Chang-Wan Ha; Sungho Jung; Jinseong Park; Jaewon Lim

Published
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Journal / collection
IEEE Access
Research area
Semiconductors
Source type
Journal article
DOI
10.1109/access.2024.3368144

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Chang-Wan Ha; Sungho Jung; Jinseong Park; Jaewon Lim. Magnetic Levitation Guiding System of a Ropeless Elevator for Semiconductor Wafer Vertical Transport: Experimental Evaluation. IEEE Access. 2024. https://doi.org/10.1109/access.2024.3368144

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