Synchrotron-based nano computed tomography of the sub-μm diamond wheels for semiconductor wafer grinding
Albert J. Shih; Kuan-Yu Chen; Chun-Chieh Wang
- Published
- Publisher
- Elsevier BV
- Journal / collection
- CIRP Journal of Manufacturing Science and Technology
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.cirpj.2026.07.002
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Cite this source
Albert J. Shih; Kuan-Yu Chen; Chun-Chieh Wang. Synchrotron-based nano computed tomography of the sub-μm diamond wheels for semiconductor wafer grinding. CIRP Journal of Manufacturing Science and Technology. 2026-10. https://doi.org/10.1016/j.cirpj.2026.07.002