A synoptic review of nanoscale vacuum channel transistor: Fabrication to electrical performance
Sana Ullah; Guancai Xie; Jian Ru Gong
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Microelectronic Engineering
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.mee.2024.112230
The original publisher provides the full text and its access options.
Cite this source
Sana Ullah; Guancai Xie; Jian Ru Gong. A synoptic review of nanoscale vacuum channel transistor: Fabrication to electrical performance. Microelectronic Engineering. 2024-10. https://doi.org/10.1016/j.mee.2024.112230