SPECIFICS OF DESIGNING AN INFRARED PYROMETER-REFLECTOMETER FOR SEMICONDUCTOR HETEROSTRUCTURE FABRICATION
Andriy Voronko; Denys Novikov; Dmytro Verbitskiy; Maksym Chmyr; Oleksandr Voloshyn; Oleksii Belkevych; Marharyta Holubets
- Published
- Publisher
- Igor Sikorsky Kyiv Polytechnic Institute
- Journal / collection
- Bulletin of Kyiv Polytechnic Institute. Series Instrument Making
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.20535/1970.67(1).2024.306723
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Cite this source
Andriy Voronko; Denys Novikov; Dmytro Verbitskiy; Maksym Chmyr; Oleksandr Voloshyn; Oleksii Belkevych; Marharyta Holubets. SPECIFICS OF DESIGNING AN INFRARED PYROMETER-REFLECTOMETER FOR SEMICONDUCTOR HETEROSTRUCTURE FABRICATION. Bulletin of Kyiv Polytechnic Institute. Series Instrument Making. 2024-06-30. https://doi.org/10.20535/1970.67(1).2024.306723