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Research literature / Journal article

Doping Profile Meter for Semiconductor Structures

Fedor Manyakhin; Dmitry Varlamov; Lyudmila Morketsova; Arkady Skvortsov; Vladimir Nikolaev

Published
Publisher
Informa UK Limited
Journal / collection
Measurement: Interdisciplinary Research and Perspectives
Research area
Semiconductors
Source type
Journal article
DOI
10.1080/15366367.2024.2390340

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Fedor Manyakhin; Dmitry Varlamov; Lyudmila Morketsova; Arkady Skvortsov; Vladimir Nikolaev. Doping Profile Meter for Semiconductor Structures. Measurement: Interdisciplinary Research and Perspectives. 2024-08-16. https://doi.org/10.1080/15366367.2024.2390340

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