Research on coherent light measurement based on white light interferometry for semiconductor industry
Weihao Zhang; Hangying Zhang; Kai Meng; Peihuang Lou
- Published
- Publisher
- SPIE
- Journal / collection
- Speckle 2023: VIII International Conference on Speckle Metrology
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3014692
The original publisher provides the full text and its access options.
Cite this source
Weihao Zhang; Hangying Zhang; Kai Meng; Peihuang Lou. Research on coherent light measurement based on white light interferometry for semiconductor industry. Speckle 2023: VIII International Conference on Speckle Metrology. 2024-03-04. https://doi.org/10.1117/12.3014692