Scanning-TEM EDX Elemental Mapping Study and Observations in Semiconductor Device Failure Analysis
Gek Li Lee; Jie Zhu
- Published
- Publisher
- IEEE
- Journal / collection
- 2024 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/ipfa61654.2024.10690905
The original publisher provides the full text and its access options.
Cite this source
Gek Li Lee; Jie Zhu. Scanning-TEM EDX Elemental Mapping Study and Observations in Semiconductor Device Failure Analysis. 2024 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA). 2024-07-15. https://doi.org/10.1109/ipfa61654.2024.10690905