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Research literature / Conference paper

Metalens manufacturing complexities and costs

Lawrence S. Melvin; Maryvonne Chalony; Andrew M. C. Dawes; Bernd Küchler; Rainer Zimmermann; Emilie Viasnoff; Ying Zhou; Al Blais

Published
Publisher
SPIE
Journal / collection
Advanced Etch Technology and Process Integration for Nanopatterning XIII
Research area
Industrial systems
Source type
Conference paper
DOI
10.1117/12.3010491

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Lawrence S. Melvin; Maryvonne Chalony; Andrew M. C. Dawes; Bernd Küchler; Rainer Zimmermann; Emilie Viasnoff; Ying Zhou; Al Blais. Metalens manufacturing complexities and costs. Advanced Etch Technology and Process Integration for Nanopatterning XIII. 2024-04-09. https://doi.org/10.1117/12.3010491

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