Advantages, manufacturing processes and challenges of FinFET technology
Jingfeng Zhou
- Published
- Publisher
- IOP Publishing
- Journal / collection
- Journal of Physics: Conference Series
- Research area
- Industrial systems
- Source type
- Journal article
- DOI
- 10.1088/1742-6596/2798/1/012045
The original publisher provides the full text and its access options.
Cite this source
Jingfeng Zhou. Advantages, manufacturing processes and challenges of FinFET technology. Journal of Physics: Conference Series. 2024-07-01. https://doi.org/10.1088/1742-6596/2798/1/012045