Design of a Compact Broadband Vector Network Analyzer to Diagnose a Semiconductor Process Chamber
Seong-Jin Kim; Heechul Jung; Jong-Won Yu; Jeong-Wook Kim; Hanam Kim; Sang-Won Lee
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Instrumentation and Measurement
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tim.2024.3502828
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Cite this source
Seong-Jin Kim; Heechul Jung; Jong-Won Yu; Jeong-Wook Kim; Hanam Kim; Sang-Won Lee. Design of a Compact Broadband Vector Network Analyzer to Diagnose a Semiconductor Process Chamber. IEEE Transactions on Instrumentation and Measurement. 2025. https://doi.org/10.1109/tim.2024.3502828