A Study on Improving the Heat Transfer Path of Semiconductor Equipment Using TRIZ
Hong Kyun Shim; Yong Won Song; Soo Yeon Ko; Byung Chul Shin; Seong Min Seo; Jung Hyeon Kim
- Published
- Publisher
- Future Convergence Technology Research Society
- Journal / collection
- Asia-pacific Journal of Convergent Research Interchange
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.47116/apjcri.2024.07.03
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Cite this source
Hong Kyun Shim; Yong Won Song; Soo Yeon Ko; Byung Chul Shin; Seong Min Seo; Jung Hyeon Kim. A Study on Improving the Heat Transfer Path of Semiconductor Equipment Using TRIZ. Asia-pacific Journal of Convergent Research Interchange. 2024-07-31. https://doi.org/10.47116/apjcri.2024.07.03