Energy-efficient optical crosslinking of underlayers for sustainable and low-power semiconductor manufacturing
Seungjoo Baek; Jelle Vandereyken; Hyo Seon Suh; Elke Caron; Andreia Santos; Masahiko Harumoto; Douglas J. Guerrero; Seonggil Heo
- Published
- Publisher
- SPIE-Intl Soc Optical Eng
- Journal / collection
- Journal of Micro/Nanopatterning, Materials, and Metrology
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1117/1.jmm.23.3.034602
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Cite this source
Seungjoo Baek; Jelle Vandereyken; Hyo Seon Suh; Elke Caron; Andreia Santos; Masahiko Harumoto; Douglas J. Guerrero; Seonggil Heo. Energy-efficient optical crosslinking of underlayers for sustainable and low-power semiconductor manufacturing. Journal of Micro/Nanopatterning, Materials, and Metrology. 2024-09-04. https://doi.org/10.1117/1.jmm.23.3.034602