Nonequilibrium Electrical Conductivity-Induced Particle Aggregation in Ceria Slurry for Semiconductor Manufacturing
Byungwook Park; Jeongmok Cho; Gangil Lee; Gyungbin Ju; Yunseo Jang; Daniel Suk; Manhee Lee
- Published
- Publisher
- Elsevier BV
- Research area
- Semiconductors
- Source type
- Preprint / posted paper
- DOI
- 10.2139/ssrn.4921898
This is a preprint or other posted paper. Check the original source for its review and publication status.
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Cite this source
Byungwook Park; Jeongmok Cho; Gangil Lee; Gyungbin Ju; Yunseo Jang; Daniel Suk; Manhee Lee. Nonequilibrium Electrical Conductivity-Induced Particle Aggregation in Ceria Slurry for Semiconductor Manufacturing. Elsevier BV. 2024. https://doi.org/10.2139/ssrn.4921898