Triple exponentially weighted moving average controller optimization using deep reinforcement learning in semiconductor manufacturing process
Tianhong Pan; Biao Jin; Zhu Ma; Liandi Fang
- Published
- Publisher
- Wiley
- Journal / collection
- Asian Journal of Control
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1002/asjc.3572
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Cite this source
Tianhong Pan; Biao Jin; Zhu Ma; Liandi Fang. Triple exponentially weighted moving average controller optimization using deep reinforcement learning in semiconductor manufacturing process. Asian Journal of Control. 2025-01-07. https://doi.org/10.1002/asjc.3572