An adaptive Copula function-based framework for fault detection in semiconductor wafer fabrication
Hong-Wei Xu; Wei Qin; Yan-Ning Sun; You-Long Lv; Jie Zhang
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Computers & Industrial Engineering
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.cie.2024.109905
The original publisher provides the full text and its access options.
Cite this source
Hong-Wei Xu; Wei Qin; Yan-Ning Sun; You-Long Lv; Jie Zhang. An adaptive Copula function-based framework for fault detection in semiconductor wafer fabrication. Computers & Industrial Engineering. 2024-02. https://doi.org/10.1016/j.cie.2024.109905