Image resolution enhancement for advanced semiconductor nodes
Lucas Rencker; Omid Tajalizadehkhoob; Khalid Elsayed; Artem Khachaturiants; Helda Pahlavani; Yan Guo; Jakob van de Laar; Erik Simons; Niranjan Saikumar; Hamed Sadeghian
- Published
- Publisher
- SPIE
- Journal / collection
- Metrology, Inspection, and Process Control XXXVIII
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3011239
The original publisher provides the full text and its access options.
Cite this source
Lucas Rencker; Omid Tajalizadehkhoob; Khalid Elsayed; Artem Khachaturiants; Helda Pahlavani; Yan Guo; Jakob van de Laar; Erik Simons; Niranjan Saikumar; Hamed Sadeghian. Image resolution enhancement for advanced semiconductor nodes. Metrology, Inspection, and Process Control XXXVIII. 2024-04-10. https://doi.org/10.1117/12.3011239