Anomaly Classification and Key Segment Detection in Semiconductor Manufacturing Processes Using Image-Based Siamese Networks
Jung In Kim; Chunghyup Mok; Hyeonji Kim; Jaehoon Kim; Hyoheon Ko; Jihoon Hong; Ju Yeon Yun; Jeong Hun Ko; Yeonjung Kim; Jiyoul Lee; Hyodong Ban; Seoung Bum Kim
- Published
- Publisher
- Korean Institute of Industrial Engineers
- Journal / collection
- Journal of the Korean Institute of Industrial Engineers
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.7232/jkiie.2024.50.4.222
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Jung In Kim; Chunghyup Mok; Hyeonji Kim; Jaehoon Kim; Hyoheon Ko; Jihoon Hong; Ju Yeon Yun; Jeong Hun Ko; Yeonjung Kim; Jiyoul Lee; Hyodong Ban; Seoung Bum Kim. Anomaly Classification and Key Segment Detection in Semiconductor Manufacturing Processes Using Image-Based Siamese Networks. Journal of the Korean Institute of Industrial Engineers. 2024-08-15. https://doi.org/10.7232/jkiie.2024.50.4.222