Structural properties and sensing characteristics of WOx-W/TiN/Ti sensitive films for extended-gate field-effect transistor pH sensors
Tung-Ming Pan; Kun-Liang Lin; Wei-Che Weng; Jim-Long Her; See-Tong Pang
- Published
- Publisher
- Elsevier BV
- Research area
- Semiconductors
- Source type
- Preprint / posted paper
- DOI
- 10.2139/ssrn.5721776
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Cite this source
Tung-Ming Pan; Kun-Liang Lin; Wei-Che Weng; Jim-Long Her; See-Tong Pang. Structural properties and sensing characteristics of WOx-W/TiN/Ti sensitive films for extended-gate field-effect transistor pH sensors. Elsevier BV. 2025. https://doi.org/10.2139/ssrn.5721776