Multi-Domain Data Integration for Plasma Diagnostics in Semiconductor Manufacturing Using Tri-CycleGAN
Minji Kang; Sung Kyu Jang; Jihun Kim; Seongho Kim; Changmin Kim; Hyo-Chang Lee; Wooseok Kang; Min Sup Choi; Hyeongkeun Kim; Hyeong-U Kim
- Published
- Publisher
- MDPI AG
- Journal / collection
- Journal of Sensor and Actuator Networks
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.3390/jsan13060075
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Cite this source
Minji Kang; Sung Kyu Jang; Jihun Kim; Seongho Kim; Changmin Kim; Hyo-Chang Lee; Wooseok Kang; Min Sup Choi; Hyeongkeun Kim; Hyeong-U Kim. Multi-Domain Data Integration for Plasma Diagnostics in Semiconductor Manufacturing Using Tri-CycleGAN. Journal of Sensor and Actuator Networks. 2024-11-04. https://doi.org/10.3390/jsan13060075