Deep learning aided tool for fast and accurate segmentation of multi-part semiconductor features
Isaac Wilfried Sanou; Julien Baderot; Ali Hallal; Stéphanie Bricq; Yannick Benezeth; Franck Marzani; Sergio Martinez; Johann Foucher
- Published
- Publisher
- SPIE
- Journal / collection
- Metrology, Inspection, and Process Control XXXVIII
- Research area
- AI & compute
- Source type
- Conference paper
- DOI
- 10.1117/12.3009287
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Cite this source
Isaac Wilfried Sanou; Julien Baderot; Ali Hallal; Stéphanie Bricq; Yannick Benezeth; Franck Marzani; Sergio Martinez; Johann Foucher. Deep learning aided tool for fast and accurate segmentation of multi-part semiconductor features. Metrology, Inspection, and Process Control XXXVIII. 2024-04-10. https://doi.org/10.1117/12.3009287