Assessment and optimization of the cascaded transistor method for the direct extraction of access resistance components in FinFET and NSFET devices.
Pierre Eyben; An De Keersgieter; Philippe Matagne; Hans Mertens; Thomas Chiarella; Clément Porret Porret; Camila Toledo de Carvalho Cavalcante; Yong Kong Siew; Jerome Mitard; Naoto Horiguchi
- Published
- Publisher
- The Japan Society of Applied Physics
- Journal / collection
- Extended Abstracts of the 2024 International Conference on Solid State Devices and Materials
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.7567/ssdm.2024.a-6-05
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Cite this source
Pierre Eyben; An De Keersgieter; Philippe Matagne; Hans Mertens; Thomas Chiarella; Clément Porret Porret; Camila Toledo de Carvalho Cavalcante; Yong Kong Siew; Jerome Mitard; Naoto Horiguchi. Assessment and optimization of the cascaded transistor method for the direct extraction of access resistance components in FinFET and NSFET devices.. Extended Abstracts of the 2024 International Conference on Solid State Devices and Materials. 2024-09-04. https://doi.org/10.7567/ssdm.2024.a-6-05