Metal-Semiconductor-Metal Photodiode Fabricated With an AlGaN/AlN Superlattice for UV Light Detection
Tong-Wen Wang; Mukta Sharma; Chia-Lung Tsai; Jin-Rong Zhang
- Published
- Publisher
- IOP Publishing
- Journal / collection
- Semiconductor Science and Technology
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1088/1361-6641/ada983
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Cite this source
Tong-Wen Wang; Mukta Sharma; Chia-Lung Tsai; Jin-Rong Zhang. Metal-Semiconductor-Metal Photodiode Fabricated With an AlGaN/AlN Superlattice for UV Light Detection. Semiconductor Science and Technology. 2025-01-13. https://doi.org/10.1088/1361-6641/ada983