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Research literature / Conference paper

Manufacturing of phase gratings using nanoimprint lithography

Regina Schuster; Annika Dehm; Selina Burkert; Christos Karapatzakis; Andreas Heinrich; Anne Harth

Published
Publisher
SPIE
Journal / collection
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII
Research area
Industrial systems
Source type
Conference paper
DOI
10.1117/12.3001400

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Regina Schuster; Annika Dehm; Selina Burkert; Christos Karapatzakis; Andreas Heinrich; Anne Harth. Manufacturing of phase gratings using nanoimprint lithography. Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII. 2024-03-13. https://doi.org/10.1117/12.3001400

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