Heterogeneous Integration of Compound Semiconductor Materials and Devices by Ion-Cutting Technique
Tiangui You; Tian Liang; Jiaxin Ding; Jialiang Sun; Shangyu Yang; Xin Ou
- Published
- Publisher
- IEEE
- Journal / collection
- 2025 9th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/edtm61175.2025.11040187
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Cite this source
Tiangui You; Tian Liang; Jiaxin Ding; Jialiang Sun; Shangyu Yang; Xin Ou. Heterogeneous Integration of Compound Semiconductor Materials and Devices by Ion-Cutting Technique. 2025 9th IEEE Electron Devices Technology & Manufacturing Conference (EDTM). 2025-03-09. https://doi.org/10.1109/edtm61175.2025.11040187