EBSD and High-Resolution EBSD for Semiconductor Failure Analysis: Practical Methods and Applications
Dr. Pawel Nowakowski
- Published
- Publisher
- ASM International
- Journal / collection
- International Symposium for Testing and Failure Analysis
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.31399/asm.cp.istfa2026tp00t1
The original publisher provides the full text and its access options.
Cite this source
Dr. Pawel Nowakowski. EBSD and High-Resolution EBSD for Semiconductor Failure Analysis: Practical Methods and Applications. International Symposium for Testing and Failure Analysis. 2026-10-04. https://doi.org/10.31399/asm.cp.istfa2026tp00t1