Fused Silica Container Material with Al2O3 Nanofiber Additions for Semiconductor Technologies
E. Yu. Podshibyakina; A. F. Shimanskii; M. N. Vasil’eva; M. M. Simunin; R. G. Eromasov; T. V. Bermeshev
- Published
- Publisher
- Pleiades Publishing Ltd
- Journal / collection
- Inorganic Materials
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1134/s0020168524701085
The original publisher provides the full text and its access options.
Cite this source
E. Yu. Podshibyakina; A. F. Shimanskii; M. N. Vasil’eva; M. M. Simunin; R. G. Eromasov; T. V. Bermeshev. Fused Silica Container Material with Al2O3 Nanofiber Additions for Semiconductor Technologies. Inorganic Materials. 2024-07. https://doi.org/10.1134/s0020168524701085