Estimating viscosities of semiconductor-manufacturing gases
Esteban Gonzalez
- Published
- Publisher
- AIP Publishing
- Journal / collection
- AIP Advances
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1063/6.0004312
The original publisher provides the full text and its access options.
Cite this source
Esteban Gonzalez. Estimating viscosities of semiconductor-manufacturing gases. AIP Advances. 2025-02-01. https://doi.org/10.1063/6.0004312