Strain Evolution in SiGe Nanosheet Transistor Process Flow
Hung-Chun Chou; Tao Chou; Shee-Jier Chueh; Sun-Rong Jan; Bo-Wei Huang; Chien-Te Tu; Yi-Chun Liu; Li-Kai Wang; C. W. Liu
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Electron Devices
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/ted.2024.3383409
The original publisher provides the full text and its access options.
Cite this source
Hung-Chun Chou; Tao Chou; Shee-Jier Chueh; Sun-Rong Jan; Bo-Wei Huang; Chien-Te Tu; Yi-Chun Liu; Li-Kai Wang; C. W. Liu. Strain Evolution in SiGe Nanosheet Transistor Process Flow. IEEE Transactions on Electron Devices. 2024-05. https://doi.org/10.1109/ted.2024.3383409