Through-focus scanning re-radiance simulation for semiconductor inspection system development
Byeongjoon Jeong; Heejoo Choi; Daewook Kim; Youngsik Kim
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Optical Review
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1007/s10043-025-00959-y
The original publisher provides the full text and its access options.
Cite this source
Byeongjoon Jeong; Heejoo Choi; Daewook Kim; Youngsik Kim. Through-focus scanning re-radiance simulation for semiconductor inspection system development. Optical Review. 2025-03-19. https://doi.org/10.1007/s10043-025-00959-y