Microsphere-assisted hyperspectral imaging: super-resolution, non-destructive metrology for semiconductor devices
Jangryul Park; Youngsun Choi; Soonyang Kwon; Youngjun Lee; Jiwoong Kim; Jae-joon Kim; Jihye Lee; Jeongho Ahn; Hidong Kwak; Yusin Yang; Taeyong Jo; Myungjun Lee; Kwangrak Kim
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Light: Science & Applications
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1038/s41377-024-01469-3
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Cite this source
Jangryul Park; Youngsun Choi; Soonyang Kwon; Youngjun Lee; Jiwoong Kim; Jae-joon Kim; Jihye Lee; Jeongho Ahn; Hidong Kwak; Yusin Yang; Taeyong Jo; Myungjun Lee; Kwangrak Kim. Microsphere-assisted hyperspectral imaging: super-resolution, non-destructive metrology for semiconductor devices. Light: Science & Applications. 2024-05-28. https://doi.org/10.1038/s41377-024-01469-3