Universal Deoxidation of Semiconductor Substrates Assisted by Machine Learning and Real-Time Feedback Control
Chao Shen; Wenkang Zhan; Jian Tang; Zhaofeng Wu; Bo Xu; Chao Zhao; Zhanguo Wang
- Published
- Publisher
- American Chemical Society (ACS)
- Journal / collection
- ACS Applied Materials & Interfaces
- Research area
- AI & compute
- Source type
- Journal article
- DOI
- 10.1021/acsami.4c01765
The original publisher provides the full text and its access options.
Cite this source
Chao Shen; Wenkang Zhan; Jian Tang; Zhaofeng Wu; Bo Xu; Chao Zhao; Zhanguo Wang. Universal Deoxidation of Semiconductor Substrates Assisted by Machine Learning and Real-Time Feedback Control. ACS Applied Materials & Interfaces. 2024-03-30. https://doi.org/10.1021/acsami.4c01765