Thin film analysis using self-referenced terahertz transient signal for semiconductor manufacturing applications
Inkeun Baek; Sunhong Jun; Yoonkyung Jang; Martin Priwisch; Suhwan Park; Eun Hyuk Choi; Wontae Kim; SungYoon Ryu; Taejoong Kim; Myungjun Lee; Yusin Yang
- Published
- Publisher
- IEEE
- Journal / collection
- 2024 49th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/irmmw-thz60956.2024.10697716
The original publisher provides the full text and its access options.
Cite this source
Inkeun Baek; Sunhong Jun; Yoonkyung Jang; Martin Priwisch; Suhwan Park; Eun Hyuk Choi; Wontae Kim; SungYoon Ryu; Taejoong Kim; Myungjun Lee; Yusin Yang. Thin film analysis using self-referenced terahertz transient signal for semiconductor manufacturing applications. 2024 49th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz). 2024-09-01. https://doi.org/10.1109/irmmw-thz60956.2024.10697716