Buried power rail to suppress substrate leakage in complementary field effect transistor (CFET)
Eungyo Jang; Jaehyuk Lim; Changhwan Shin
- Published
- Publisher
- IOP Publishing
- Journal / collection
- Nano Express
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1088/2632-959x/ada0ce
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Cite this source
Eungyo Jang; Jaehyuk Lim; Changhwan Shin. Buried power rail to suppress substrate leakage in complementary field effect transistor (CFET). Nano Express. 2024-12-01. https://doi.org/10.1088/2632-959x/ada0ce