Sustainability in Semiconductor Production via Interpretable and Reliable Predictions
Kiavash Fathi; Maria Stramaglia; Marko Ristin; Marcin Sadurski; Tobias Kleinert; Robert Schönfelder; Hans Wernher van de Venn
- Published
- Publisher
- Elsevier BV
- Journal / collection
- IFAC-PapersOnLine
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.ifacol.2024.07.213
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Cite this source
Kiavash Fathi; Maria Stramaglia; Marko Ristin; Marcin Sadurski; Tobias Kleinert; Robert Schönfelder; Hans Wernher van de Venn. Sustainability in Semiconductor Production via Interpretable and Reliable Predictions. IFAC-PapersOnLine. 2024. https://doi.org/10.1016/j.ifacol.2024.07.213